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Plasma Etching by M. Sugawara, Hardcover | Indigo Chapters

Compare Plasma Etching by M. Sugawara, Hardcover | Indigo Chapters

M. Sugawara

$435.00

The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored. | Plasma Etching by M. Sugawara, Hardcover | Indigo Chapters

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