Compare Handbook of Ion Beam Processing Technology: Principles Deposition Film Modification & Synthesis by Stephen M. Rossnagel, Hardcover | Indigo Chapters

This book, by 36 authorities on the subject, deals with ion beam processing for basic sputter etching of samples, for sputter deposition of thin films, for synthesis of material in thin film form, and of the modification of thin film properties. | Handbook of Ion Beam Processing Technology: Principles Deposition Film Modification & Synthesis by Stephen M. Rossnagel, Hardcover | Indigo Chapters