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Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices by Eric Garfunkel, Hardcover | Indigo Chapters

Compare Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices by Eric Garfunkel, Hardcover | Indigo Chapters

Eric Garfunkel

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An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of | Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices by Eric Garfunkel, Hardcover | Indigo Chapters

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